Low-energy electron diffraction (LEED), Auger electron spectroscopy and depth profile were used to study the growth and annealing effects of mirror systems : Ag/Co/Pt(111) and Co/Ag/Pt(111). An anomalous behavior of specular beam intensity of LEED versus temperature was found in the annealing process for Ag/Co/Pt(111). A dramatic increase of the beam intensity occurs after Co-Pt alloy formation is complete. The exchange between Co and Ag atoms of Co/Ag/Pt(111) occurs when the annealing temperature is high enough. The Co-Pt alloy develops after the atomic exchange is complete. The chemical compositions at the interfaces of these two ultrathin films were investigated. The mechanisms of the different behaviors of the two systems in the annealing processes are discussed.